Date of Award


Document Type


Degree Name

Master of Science in Electrical Engineering


Department of Electrical and Computer Engineering


Both size and cost of mechanical and optical inertial navigation systems (INS) have prevented their use in many applications. By developing a micromachined gyroscope and combining it with existing micromachined accelerometer designs to form a low sensitivity INS, the cost would be reduced by a factor of 10 or more. The lower per unit cost would open new areas for INS use. A second advantage of the micromachined INS would be its size. A micromachined INS would weigh only a few ounces and take significantly less space, allowing more room for electronics and the weight reduction would lead to longer mission times. In this thesis three micromachined gyroscopes were developed and fabricated: a micromachined comb-drive vibrating gyroscope, a planar gimballed gyroscope, and a vibrating ring gyroscope. The micromachined gyroscopes were fabricated using the Multi User MEMS (Micro Electro Mechanical Systems) Process (MUMPS). These devices were then tested in AFIT's microelectronics laboratories.

AFIT Designator


DTIC Accession Number