Date of Award


Document Type


Degree Name

Master of Science


Department of Engineering Physics

First Advisor

Michael C. Roggeman, PhD


MEMS (Micro-Electro-Mechanical Systems) micromirror devices can be used to control the phase of a propagating light wavefront, and in particular to correct aberrations that may be present in the wavefront, due to either atmospheric turbulence or any other type of fixed or time and space varying aberrations. In order to shorten the design cycle of MEMS micromirror devices, computer software is developed to create, from MEMS micromirror device design data, a numerical model of the MEMS device. The model is then used to compute the far field diffraction pattern of a wavefront reflected from the device, and to predict the effectiveness with which it can be used to correct an aberrated wavefront. For validation, the computed far field diffraction pattern is compared to that measured using a real MEMS micromirror device, with a reasonable match between the two being found. The model is designed for maximum flexibility and can be easily adapted to new designs of MEMS micromirror devices.

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