Date of Award
Master of Science
Department of Electrical and Computer Engineering
Victor M. Bright, PhD
Optical scanners play a prominent role in the commercial and military industries. The scanner's size, cost and reliability are critical characteristics. In this research a microoptical scanning system was fabricated by incorporating a vertical cavity surface emitting laser (VCSEL) onto a surface machined microelectromechanical die. The micro optics for laser beam steering includes a 135 deg mirror, a Fresnel lens, a lateral scanning rotating mirror, and a vertical scanning fan mirror. The VCSEL was attached to the die by solder and electrical connection was provided by wire bonding. Based on far field measurements the scanner had a lateral scan angle of 5.7 degrees and a vertical scan angle of 4.4 degrees. Based on spot diameter measurements at the fan mirror the scanner had a divergence angle of 0.524 degrees. The potential military applications of these scanners include laser radars, laser detectors, holographic storage devices, and data links between integrated circuit chips.
DTIC Accession Number
Bouchard, Joseph G. Jr., "Microelectromechanical Scanner Using a Vertical Cavity Surface Emitting Laser" (1997). Theses and Dissertations. 5580.