Date of Award


Document Type


Degree Name

Master of Science in Electrical Engineering


Department of Electrical and Computer Engineering

First Advisor

Hengky Chandrahalim, PhD


Piezoelectric contour mode resonator technology has the unique advantage of combining low motional resistance with the ability to define multiple frequencies on the same substrate. Contour mode resonators can be mechanically coupled together to form robust band-pass filters for the next generation of GPS satellites with extreme size reduction compared to electrically coupled filters. Piezoelectric zinc oxide (ZnO) contour mode resonators have the potential for monolithic integration with current ZnO transistor further reducing size, power consumption, and cost of filter modules. Barium strontium titanate (BST) contour mode resonators have incredible frequency tunability due to the fundamental nature of the thin film in the presence of a DC bias. BST resonators can be intrinsically switched on and off with the application of a DC bias. Through this research, the feasibility of the design and fabrication of piezoelectric radio frequency (RF) microelectromechanical system (MEMS) filters using ZnO, BST, and metals with high melting points is presented.

AFIT Designator


DTIC Accession Number