The Effects of Ionizing Radiation on Microelectromechanical Systems (MEMS) Actuators: Electrostatic, Electrothermal, and Residual Stress

Author

Jared R. Caffey

Date of Award

3-2003

Document Type

Thesis

Degree Name

Master of Science

Department

Department of Electrical and Computer Engineering

First Advisor

Paul E. Kladitis, PhD

Abstract

The effects of ionizing radiation on the operation of polysilicon mmicroelectromechanical system (MEMS) electrostatic actuators, electrothermal actuators, and residual stress cantilevers were examined. Pre-irradiation, in-situ, and post-irradiation measurements were taken for the electrosatic and electrothermal actuators. The residual stress cantilevers were characterized before and after irradiation. All devices were irradiated to a total ionizing does of 1 megarad(Si) using both the Air Force Research Laboratory's low energy X-ray source and Co-60 gamma source.

AFIT Designator

AFIT-GE-ENG-03-05

DTIC Accession Number

ADA415708

Recommended Citation

Caffey, Jared R., "The Effects of Ionizing Radiation on Microelectromechanical Systems (MEMS) Actuators: Electrostatic, Electrothermal, and Residual Stress" (2003). Theses and Dissertations. 4236.
https://scholar.afit.edu/etd/4236