Date of Award

3-2003

Document Type

Thesis

Degree Name

Master of Science

Department

Department of Electrical and Computer Engineering

First Advisor

Paul E. Kladitis, PhD

Abstract

Mechanical computing devices in polysilicon-based microelectromechanical systems (MEMS) were designed with the goal of developing computing devices for harsh environments, such as those with high dose radiation and high temperatures, as well as devices that may be able to interface with molecular or biological computer systems. The devices that were designed include both analog and digital computing devices. The analog devices include integrators, differentials (summers), multipliers, and those that perform trigonometric functions. The digital devices that were designed are inverters, NAND, NOR, and XOR logic gates. Analog-to-digital (A-to-D) and digital-to-analog (D-to-A) converters were also designed. The designs were submitted to a commercial surface micromachining foundry to be fabricated. The completed MEMS devices were then released and tested to determine proper operation. Of the mechanical devices that have been fabricated and tested, a functioning inverter, sine function device, cosine function device, and digital-to-analog converter have been demonstrated.

AFIT Designator

AFIT-GE-ENG-03-04

DTIC Accession Number

ADA415137

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