Date of Award
Master of Science in Electrical Engineering
Department of Electrical and Computer Engineering
Hengky Chandrahalim, PhD
This research leveraged two-photon polymerization microfabrication to integrate dynamic mechanical components with Fabry-Perot resonators onto the ends of low-loss optical fibers to prototype 3 micro-optic devices. The first device featured a multi-positional mirror that enabled thin-film deposition onto cavities of any length with mirrors of significant curvature, for refractive index sensing. The second device combined an FP cavity with a spring body featuring easily scalable stiffness for pressure sensing. The third device presented a high-speed rotating micro-anemometer for measuring a wide range of gas flows. All devices represent a significant reduction in size and weight over commercially available devices.
DTIC Accession Number
Williams, Jeremiah C., "Dynamic Micromechanical Fabry-Perot Cavity Sensors Fabricated by Multiphoton Absorption Onto Optical Fiber Tips" (2020). Theses and Dissertations. 3164.