Part of the Nanoscience and Nanotechnology Commons

Works by Thomas W. Kenny in Nanoscience and Nanotechnology

2009

Epitaxial silicon microshell vacuum-encapsulated CMOS-compatible 200 MHz bulk-mode resonator, Kuan-Lin Chen, Hengky Chandrahalim, Andrew B. Graham, Sunil A. Bhave, Roger T. Howe, Thomas W. Kenny
Faculty Publications