Digitally Programmable RF MEMS Filters with Mechanically Coupled Resonators, Hengky Chandrahalim, Sunil A. Bhave
Faculty Publications

Integrated PiezoMEMS actuators and sensors, Ronald G. Polcawich, Jeffrey S. Pulskamp, Sarah Bedair, Gabriel Smith, Roger Kaul, Chris Kroninger, Eric Wetzel, Hengky Chandrahalim, Sunil A. Bhave
Faculty Publications

PZT transduction of high-overtone contour-mode resonators, Hengky Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, Jeffrey S. Pulskamp, Roger Kaul
Faculty Publications

PZT transduced high-overtone width-extensional resonators above 1 GHz, Hengky Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, Jeffrey S. Pulskamp, Roger Kaul
Faculty Publications

Epitaxial silicon microshell vacuum-encapsulated CMOS-compatible 200 MHz bulk-mode resonator, Kuan-Lin Chen, Hengky Chandrahalim, Andrew B. Graham, Sunil A. Bhave, Roger T. Howe, Thomas W. Kenny
Faculty Publications

Heterodyne laser-Doppler interferometric characterization of contour-mode resonators above 1 GHz, Hengky Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, Jeffrey S. Pulskamp, Babak Pourat, Sebastian Boedecker, Christian Rembe
Faculty Publications

A Pb(Zr_0.55Ti_0.45)O₃-transduced fully differential mechanically coupled frequency agile filter, Hengky Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, Jeff Pulskamp, Roger Kaul
Faculty Publications

Monolithically integrated piezoMEMS SP2T switch and contour-mode filters, Jeff S. Pulskamp, Dan C. Judy, Ronald G. Polcawich, Roger Kaul, Hengky Chandrahalim, Sunil A. Bhave
Faculty Publications

Fully-differential mechanically-coupled PZT-on-silicon filters, Hengky Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, Jeff Pulskamp, Dan Judy, Roger Kaul, Madan Dubey
Faculty Publications

Performance comparison of Pb(Zr_0.52Ti_0.48)O₃-only and Pb(Zr_0.52Ti_0.48)O₃-on-silicon resonators, Hengky Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, Jeff Pulskamp, Dan Judy, Roger Kaul, Madan Dubey
Faculty Publications

Digitally-tunable MEMS filter using mechanically-coupled resonator array, Hengky Chandrahalim, Sunil A. Bhave
Faculty Publications

Influence of silicon on quality factor, motional impedance and tuning range of PZT-transduced resonators, Hengky Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, Jeff Pulskamp, Dan Judy, Roger Kaul, Madan Dubey
Faculty Publications

PZT thin films for RF MEMS applications, Ronald G. Polcawich, Jeff Pulskamp, Dan Judy, Roger Kaul, Madan Dubey, Hengky Chandrahalim, Sunil A. Bhave
Faculty Publications

High-κ dielectrically transduced MEMS thickness shear mode resonators and tunable channel-select RF filters, Hengky Chandrahalim, Dana Weinstein, Lih Feng Cheow, Sunil A. Bhave
Faculty Publications

Aqueous transduction of poly-SiGe disk resonators, Hengky Chandrahalim, Sunil A. Bhave, Emmanuel P. Quevy, Roger T. Howe
Faculty Publications

Dielectrically transduced single-ended to differential MEMS filter, Dana Weinstein, Hengky Chandrahalim, Lih Feng Cheow, Sunil A. Bhave
Faculty Publications

Channel-select micromechanical filters using high-κ dielectrically transduced MEMS resonators, Hengky Chandrahalim, Dana Weinstein, Lih Feng Cheow, Sunil A. Bhave
Faculty Publications

Thickness shear mode vibrations in silicon bar resonators, Hengky Chandrahalim, Dana Weinstein, Lih Feng Cheow, Sunil A. Bhave
Faculty Publications