Part of the Electro-Mechanical Systems Commons

Works by Lih Feng Cheow in Electro-Mechanical Systems

2007

High-κ dielectrically transduced MEMS thickness shear mode resonators and tunable channel-select RF filters, Hengky Chandrahalim, Dana Weinstein, Lih Feng Cheow, Sunil A. Bhave
Faculty Publications

2006

Dielectrically transduced single-ended to differential MEMS filter, Dana Weinstein, Hengky Chandrahalim, Lih Feng Cheow, Sunil A. Bhave
Faculty Publications

Channel-select micromechanical filters using high-κ dielectrically transduced MEMS resonators, Hengky Chandrahalim, Dana Weinstein, Lih Feng Cheow, Sunil A. Bhave
Faculty Publications

2005

Thickness shear mode vibrations in silicon bar resonators, Hengky Chandrahalim, Dana Weinstein, Lih Feng Cheow, Sunil A. Bhave
Faculty Publications