Using Micro-Raman Spectroscopy to Assess MEMS Si/SiO₂ Membranes Exhibiting Negative Spring Constant Behavior, LaVern A. Starman, Ronald A. Coutu
Faculty Publications

SRRs Embedded with MEMS Cantilevers to Enable Electrostatic Tuning of the Resonant Frequency, Elizabeth A. Moore, Derrick Langley, Matthew E. Jussaume, L. A. Rederus, Christopher A. Lundell, Ronald A, Coutu Jr., Peter J. Collins, LaVern A. Starman
Faculty Publications

Characterization of Residual Stress in Microelectromechanical Systems (MEMS) Devices Using Raman Spectroscopy, LaVern A. Starman
Theses and Dissertations