Part of the Electro-Mechanical Systems Commons

Works by Kuan-Lin Chen in Electro-Mechanical Systems

2009

Epitaxial silicon microshell vacuum-encapsulated CMOS-compatible 200 MHz bulk-mode resonator, Kuan-Lin Chen, Hengky Chandrahalim, Andrew B. Graham, Sunil A. Bhave, Roger T. Howe, Thomas W. Kenny
Faculty Publications