Impact of Silicon Ion Irradiation on Aluminum Nitride-transduced Microelectromechanical Resonators
Faculty Publications
Part of the Mechanical Engineering Commons
Works by Hengky Chandrahalim in Mechanical Engineering
2023
Unfolding the Effects of Cobalt-60 Irradiation on Contour-Mode Piezoelectric Resonators
Faculty Publications
Impacts of Heavy Particle Irradiation on Very High Frequency Microelectromechanical Resonators
Faculty Publications
2022
A microturbine flow sensor created on an optical fiber tip using multiphoton nanomachining process
Faculty Publications
2021
Optical fiber-tip pressure sensor featuring a spring body and multipositional Fabry–Pérot cavity resonator
Faculty Publications
2020
2019
2013
2010
2009
Epitaxial silicon microshell vacuum-encapsulated CMOS-compatible 200 MHz bulk-mode resonator
Faculty Publications
A Pb(Zr0.55Ti0.45)O3-transduced fully differential mechanically coupled frequency agile filter
Faculty Publications