Part of the Structural Materials Commons
Digitally Programmable RF MEMS Filters with Mechanically Coupled Resonators, Hengky Chandrahalim, Sunil A. Bhave Faculty Publications
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High-κ dielectrically transduced MEMS thickness shear mode resonators and tunable channel-select RF filters, Hengky Chandrahalim, Dana Weinstein, Lih Feng Cheow, Sunil A. Bhave Faculty Publications
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