Impact of Silicon Ion Irradiation on Aluminum Nitride-transduced Microelectromechanical Resonators, David D. Lynes, Joshua Young, Eric Lang, Hengky Chandrahalim
Faculty Publications

Impacts of Heavy Particle Irradiation on Very High Frequency Microelectromechanical Resonators, David D. Lynes, Eric Lang, Joshua Young, Hengky Chandrahalim
Faculty Publications