Part of the Semiconductor and Optical Materials Commons
2010
Integrated PiezoMEMS actuators and sensors, Ronald G. Polcawich, Jeffrey S. Pulskamp, Sarah Bedair, Gabriel Smith, Roger Kaul, Chris Kroninger, Eric Wetzel, Hengky Chandrahalim, Sunil A. Bhave
Faculty Publications
2009
PZT transduced high-overtone width-extensional resonators above 1 GHz, Hengky Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, Jeffrey S. Pulskamp, Roger Kaul
Faculty Publications
Heterodyne laser-Doppler interferometric characterization of contour-mode resonators above 1 GHz, Hengky Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, Jeffrey S. Pulskamp, Babak Pourat, Sebastian Boedecker, Christian Rembe
Faculty Publications