Impact of Silicon Ion Irradiation on Aluminum Nitride-transduced Microelectromechanical Resonators
Faculty Publications
Part of the Engineering Mechanics Commons
Works by Hengky Chandrahalim in Engineering Mechanics
2023
Impacts of Heavy Particle Irradiation on Very High Frequency Microelectromechanical Resonators
Faculty Publications
2022
A microturbine flow sensor created on an optical fiber tip using multiphoton nanomachining process
Faculty Publications
2021
Optical fiber-tip pressure sensor featuring a spring body and multipositional Fabry–Pérot cavity resonator
Faculty Publications