Part of the Electronic Devices and Semiconductor Manufacturing Commons
2016
Mass Reduction Patterning of Silicon-on-oxide-based Micromirrors, Harris J. Hall, Andrew Green, Sarah Dooley, Jason D. Schmidt, LaVerne A. Starman, Derrick Langley, Ronald A. Coutu Jr.
Faculty Publications
Thermal Management Using MEMS Bimorph Cantilever Beams, Ronald A. Coutu Jr., Robert S. LaFleur, John P. Walton, LaVerne A. Starman
Faculty Publications
2012