Thermal Tuning of MEMS Buckled Membrane Actuator Stiffness, Robert A. Lake, Kyle K. Ziegler, Ronald A. Coutu Jr.
Faculty Publications

Selectively Tuning a Buckled Si/SiO₂ Membrane MEMS through Joule Heating Actuation and Mechanical Restriction, Kyle K. Ziegler
Theses and Dissertations