Fully-differential mechanically-coupled PZT-on-silicon filters, Hengky Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, Jeff Pulskamp, Dan Judy, Roger Kaul, Madan Dubey
Faculty Publications

Performance comparison of Pb(Zr_0.52Ti_0.48)O₃-only and Pb(Zr_0.52Ti_0.48)O₃-on-silicon resonators, Hengky Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, Jeff Pulskamp, Dan Judy, Roger Kaul, Madan Dubey
Faculty Publications

Influence of silicon on quality factor, motional impedance and tuning range of PZT-transduced resonators, Hengky Chandrahalim, Sunil A. Bhave, Ronald G. Polcawich, Jeff Pulskamp, Dan Judy, Roger Kaul, Madan Dubey
Faculty Publications

PZT thin films for RF MEMS applications, Ronald G. Polcawich, Jeff Pulskamp, Dan Judy, Roger Kaul, Madan Dubey, Hengky Chandrahalim, Sunil A. Bhave
Faculty Publications