High-κ dielectrically transduced MEMS thickness shear mode resonators and tunable channel-select RF filters, Hengky Chandrahalim, Dana Weinstein, Lih Feng Cheow, Sunil A. Bhave
Faculty Publications

Dielectrically transduced single-ended to differential MEMS filter, Dana Weinstein, Hengky Chandrahalim, Lih Feng Cheow, Sunil A. Bhave
Faculty Publications

Channel-select micromechanical filters using high-κ dielectrically transduced MEMS resonators, Hengky Chandrahalim, Dana Weinstein, Lih Feng Cheow, Sunil A. Bhave
Faculty Publications

Thickness shear mode vibrations in silicon bar resonators, Hengky Chandrahalim, Dana Weinstein, Lih Feng Cheow, Sunil A. Bhave
Faculty Publications