Epitaxial silicon microshell vacuum-encapsulated CMOS-compatible 200 MHz bulk-mode resonator, Kuan-Lin Chen, Hengky Chandrahalim, Andrew B. Graham, Sunil A. Bhave, Roger T. Howe, Thomas W. Kenny
Faculty Publications

Aqueous transduction of poly-SiGe disk resonators, Hengky Chandrahalim, Sunil A. Bhave, Emmanuel P. Quevy, Roger T. Howe
Faculty Publications