High-κ dielectrically transduced MEMS thickness shear mode resonators and tunable channel-select RF filters, Hengky Chandrahalim, Dana Weinstein, Lih Feng Cheow, Sunil A. Bhave
Faculty Publications

Dielectrically transduced single-ended to differential MEMS filter, Dana Weinstein, Hengky Chandrahalim, Lih Feng Cheow, Sunil A. Bhave
Faculty Publications

MEMS filter with voltage-tunable center frequency and bandwidth, Lih Feng Cheow, Hengky Chandrahalim, Sunil A. Bhave
Faculty Publications

Channel-select micromechanical filters using high-κ dielectrically transduced MEMS resonators, Hengky Chandrahalim, Dana Weinstein, Lih Feng Cheow, Sunil A. Bhave
Faculty Publications