Abstract
A digitally-tunable RF MEMS filter includes a substrate and a plurality of mechanically coupled resonators, wherein a first and a last resonator of the plurality of mechanically coupled resonators are configured to be electrostatically transduced. One or more of the plurality of mechanically coupled resonators are configured to be biased relative to the substrate such that the one or more biased resonators may be brought substantially in contact with the substrate. In a method of digitally tuning an RF MEMS filter having a mechanically coupled resonator array, a DC bias voltage is applied to at least a first resonator and a last resonator of the mechanically coupled resonator array such that motional boundary conditions for the at least first resonator and last resonator are selectable in proportion to the DC bias voltage.
Document Type
Patent
Status
Active
Issue Date
3-5-2013
Patent Number
US 8390398 B2 [ 8,390,398 ]
CPC Classification
H03H9/462
Application number
12/608,290
Assignees
Cornell Center for Technology, Enterprise and Commercialization, Ithaca, NY (US)
Filing Date
10-29-2009
Recommended Citation
Chandrahalim, Hengky, and Sunil Ashok Bhave. Digitally Programmable RF MEMS Filters with Mechanically Coupled Resonators. United States Patent 8390398 (B2), issued 5 March 2013. https://scholar.afit.edu/patents/1
Included in
Electrical and Electronics Commons, Electro-Mechanical Systems Commons, Electronic Devices and Semiconductor Manufacturing Commons