A Two-Dimensional Particle Simulation of Parallel Plate Radio-Frequency (RF) Glow Discharges

Author

Eric J. Bennett

Date of Award

12-1992

Document Type

Thesis

Degree Name

Master of Science

Department

Department of Engineering Physics

First Advisor

William F. Bailey, PhD

Abstract

A two-dimensional model of parallel plate RF glow discharges was developed to study discharge phenomena important in plasma assisted processing of materials. The particle-in-cell method is used to calculate the trajectories of computer particles under the influence of both self and applied fields. Monte Carlo methods using the null collision technique are used to model collisions between charged particles and neutral gas atoms. Results of computer experiments are presented with special emphasis placed on ion motion in the sheath regions. Experimental results show some qualitative agreement with one-dimensional model results. Further work required to gain quantitative agreement is outlined.

AFIT Designator

AFIT-GEP-ENP-92D-1

DTIC Accession Number

ADA258856

Comments

The author's Vita page is omitted.

Recommended Citation

Bennett, Eric J., "A Two-Dimensional Particle Simulation of Parallel Plate Radio-Frequency (RF) Glow Discharges" (1992). Theses and Dissertations. 7181.
https://scholar.afit.edu/etd/7181